Reliable Threshold Voltage Determination for Sub-0. 1mm m mm Gate Length MOSFET's
نویسندگان
چکیده
A reliable method to determine the threshold voltage Vth for MOSFETs with gate length down to sub-0.1 μm has been developed. The method determines Vth by linear extrapolation of the transconductance gm to zero and is therefore named "GMLE method". 2D simulations were performed to extract the physical meaning of the method and to prove its reliability for different technologies. The results reveal that determined Vth values always meet the threshold condition i. e. the onset of inversion layer build-up.
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تاریخ انتشار 1997